Comparison of the Indentation Processes Using the Single Indenter and Indenter Array: A Molecular Dynamics Study

Fabrication of periodic nanostructures has drawn increasing interest owing to their applications of such functional structures in optics, biomedical and power generation devices. Nano-indentation technique has been proven as a method to fabricate periodic nanostructures. In this study, the molecular dynamic simulation approach is employed to investigate the nano-indentation process for fabricating periodic nano-pit arrays using a single indenter and an indenter array. The morphologies of indentations that machined using these two kinds of indenters are compared. The indentation force and the defect evolution during the nano-indentation process are further studied. Results show that indentation morphologies obtained by single indenter are mainly depended on the spacing of indenters, and a nano-pit array with a better shape and consistency can be obtained easier using the indenter array compared with using a single indenter. The stacking faults and dislocations induced by indentation are depended on the spacing of the indenters. Our findings are significant for understanding the differences of indentation processes using a single indenter and an indenter array and machining a high-quality periodic nano-pit array with high machining efficiency. GRAPHICAL ABSTRACT: [Image: see text]