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Fabrication of chemically stable hydrogen- and niobium-codoped ZnO transparent conductive films
H- and Nb-doped ZnO (HNZO) thin films were fabricated on glass substrates with radio frequency magnetron sputtering. The effect of the flow rate of H(2) has been investigated by analyzing the structural, optical, and electrical properties. The incorporation of H during the deposition of Nb-incorpora...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9063663/ https://www.ncbi.nlm.nih.gov/pubmed/35515826 http://dx.doi.org/10.1039/c9ra01231a |