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Thermal effect of annealing-temperature on solution-processed high-k ZrO(2) dielectrics

In this paper, a solution-processed zirconium oxide (ZrO(2)) dielectric was deposited by spin coating with varying pre-annealing temperatures and post-annealing temperatures. The thermal effect of the pre-annealing and post-annealing process on the structural and electrical properties of ZrO(2) film...

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Detalles Bibliográficos
Autores principales:	Zhou, Shangxiong, Zhang, Jianhua, Fang, Zhiqiang, Ning, Honglong, Cai, Wei, Zhu, Zhennan, Liang, Zhihao, Yao, Rihui, Guo, Dong, Peng, Junbiao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2019
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9076591/ https://www.ncbi.nlm.nih.gov/pubmed/35542877 http://dx.doi.org/10.1039/c9ra06132k

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