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Study on the growth of Al-doped ZnO thin films with (112̄0) and (0002) preferential orientations and their thermoelectric characteristics

In this work, using a conventional magnetron sputtering system, Al-doped ZnO (AZO) films with (112̄0) and (0002) preferential orientations were grown on r-sapphire and a-sapphire substrates, respectively. The effect of substrate and deposition temperature on the growth of AZO films and their prefere...

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Detalles Bibliográficos
Autores principales:	Luo, Jing-Ting, Quan, Ao-Jie, Zheng, Zhuang-Hao, Liang, Guang-Xing, Li, Fu, Zhong, Ai-Hua, Ma, Hong-Li, Zhang, Xiang-Hua, Fan, Ping
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2018
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078226/ https://www.ncbi.nlm.nih.gov/pubmed/35539614 http://dx.doi.org/10.1039/c7ra12485f

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