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ppb level detection of NO(2) using a WO(3) thin film-based sensor: material optimization, device fabrication and packaging
In this study, we have investigated the thickness-dependent nitrogen dioxide (NO(2)) sensing characteristics of a reactive-ion magnetron sputtered tungsten trioxide (WO(3)) film, followed by morphological and electrical characterizations. Subsequently, the sensing material was integrated with an MEM...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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The Royal Society of Chemistry
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078366/ https://www.ncbi.nlm.nih.gov/pubmed/35540398 http://dx.doi.org/10.1039/c7ra13659e |