Morphology and mechanical behavior of diamond films fabricated by IH-MPCVD

Morphology of diamond films has been controlled via intermediate frequency induction heated microwave plasma chemical vapor deposition (IH-MPCVD), which was transformed with various substrate temperatures (T(sub) = 923–1123 K) and CH(4)/H(2) ratios (η(c) = 0.5–2 vol%). The coupling effects of T(sub)...

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Detalles Bibliográficos
Autores principales: Tu, Rong, Xu, Tiantian, Li, Dengfeng, Zhang, Song, Yang, Meijun, Li, Qizhong, Zhang, Lianmeng, Shimada, Toshihiro, Goto, Takashi, Shi, Ji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080281/
https://www.ncbi.nlm.nih.gov/pubmed/35542198
http://dx.doi.org/10.1039/c8ra01871e

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080281/
https://www.ncbi.nlm.nih.gov/pubmed/35542198
http://dx.doi.org/10.1039/c8ra01871e

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