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Morphology and mechanical behavior of diamond films fabricated by IH-MPCVD
Morphology of diamond films has been controlled via intermediate frequency induction heated microwave plasma chemical vapor deposition (IH-MPCVD), which was transformed with various substrate temperatures (T(sub) = 923–1123 K) and CH(4)/H(2) ratios (η(c) = 0.5–2 vol%). The coupling effects of T(sub)...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080281/ https://www.ncbi.nlm.nih.gov/pubmed/35542198 http://dx.doi.org/10.1039/c8ra01871e |