Investigation of the occupancy ratio dependence for microlens arrays on diamond

Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricat...

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Detalles Bibliográficos
Autores principales: Zhu, Tian-Fei, Fu, Jiao, Liu, Zongchen, Liang, Yan, Wang, Wei, Wen, Feng, Zhang, Jingwen, Wang, Hong-Xing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9085271/
https://www.ncbi.nlm.nih.gov/pubmed/35547301
http://dx.doi.org/10.1039/c8ra03803a
Descripción
Sumario:Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.

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