Investigation of the occupancy ratio dependence for microlens arrays on diamond

Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricat...

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Detalles Bibliográficos
Autores principales: Zhu, Tian-Fei, Fu, Jiao, Liu, Zongchen, Liang, Yan, Wang, Wei, Wen, Feng, Zhang, Jingwen, Wang, Hong-Xing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9085271/
https://www.ncbi.nlm.nih.gov/pubmed/35547301
http://dx.doi.org/10.1039/c8ra03803a
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author Zhu, Tian-Fei
Fu, Jiao
Liu, Zongchen
Liang, Yan
Wang, Wei
Wen, Feng
Zhang, Jingwen
Wang, Hong-Xing
author_facet Zhu, Tian-Fei
Fu, Jiao
Liu, Zongchen
Liang, Yan
Wang, Wei
Wen, Feng
Zhang, Jingwen
Wang, Hong-Xing
author_sort Zhu, Tian-Fei
collection PubMed
description Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.
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spelling pubmed-90852712022-05-10 Investigation of the occupancy ratio dependence for microlens arrays on diamond Zhu, Tian-Fei Fu, Jiao Liu, Zongchen Liang, Yan Wang, Wei Wen, Feng Zhang, Jingwen Wang, Hong-Xing RSC Adv Chemistry Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance. The Royal Society of Chemistry 2018-08-20 /pmc/articles/PMC9085271/ /pubmed/35547301 http://dx.doi.org/10.1039/c8ra03803a Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by/3.0/
spellingShingle Chemistry
Zhu, Tian-Fei
Fu, Jiao
Liu, Zongchen
Liang, Yan
Wang, Wei
Wen, Feng
Zhang, Jingwen
Wang, Hong-Xing
Investigation of the occupancy ratio dependence for microlens arrays on diamond
title Investigation of the occupancy ratio dependence for microlens arrays on diamond
title_full Investigation of the occupancy ratio dependence for microlens arrays on diamond
title_fullStr Investigation of the occupancy ratio dependence for microlens arrays on diamond
title_full_unstemmed Investigation of the occupancy ratio dependence for microlens arrays on diamond
title_short Investigation of the occupancy ratio dependence for microlens arrays on diamond
title_sort investigation of the occupancy ratio dependence for microlens arrays on diamond
topic Chemistry
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9085271/
https://www.ncbi.nlm.nih.gov/pubmed/35547301
http://dx.doi.org/10.1039/c8ra03803a
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