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The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofur...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086484/ https://www.ncbi.nlm.nih.gov/pubmed/35548105 http://dx.doi.org/10.1039/c8ra06417b |
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author | Potter, Dominic B. Parkin, Ivan P. Carmalt, Claire J. |
author_facet | Potter, Dominic B. Parkin, Ivan P. Carmalt, Claire J. |
author_sort | Potter, Dominic B. |
collection | PubMed |
description | Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofuran, n-hexane, cyclohexane, and ethyl acetate. The crystal structures, elemental compositions and surface morphologies of the resulting AZO films were determined, as well as the optoelectronic properties. It was found that the more polar solvents enhanced growth in the (002) plane of the wurtzite crystal structure, and that solutions with low viscosities resulted in superior grain growth. The film deposited from a solution consisting of methanol and ethyl acetate displayed the lowest visible transmittance, due to carbon contamination. However, it also exhibited 60% lower resistivity, in comparison to the film deposited using methanol only. This suggests that optoelectronic properties can be tuned for specific photovoltaic devices. |
format | Online Article Text |
id | pubmed-9086484 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | The Royal Society of Chemistry |
record_format | MEDLINE/PubMed |
spelling | pubmed-90864842022-05-10 The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD Potter, Dominic B. Parkin, Ivan P. Carmalt, Claire J. RSC Adv Chemistry Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofuran, n-hexane, cyclohexane, and ethyl acetate. The crystal structures, elemental compositions and surface morphologies of the resulting AZO films were determined, as well as the optoelectronic properties. It was found that the more polar solvents enhanced growth in the (002) plane of the wurtzite crystal structure, and that solutions with low viscosities resulted in superior grain growth. The film deposited from a solution consisting of methanol and ethyl acetate displayed the lowest visible transmittance, due to carbon contamination. However, it also exhibited 60% lower resistivity, in comparison to the film deposited using methanol only. This suggests that optoelectronic properties can be tuned for specific photovoltaic devices. The Royal Society of Chemistry 2018-09-25 /pmc/articles/PMC9086484/ /pubmed/35548105 http://dx.doi.org/10.1039/c8ra06417b Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by/3.0/ |
spellingShingle | Chemistry Potter, Dominic B. Parkin, Ivan P. Carmalt, Claire J. The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title | The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title_full | The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title_fullStr | The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title_full_unstemmed | The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title_short | The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD |
title_sort | effect of solvent on al-doped zno thin films deposited via aerosol assisted cvd |
topic | Chemistry |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086484/ https://www.ncbi.nlm.nih.gov/pubmed/35548105 http://dx.doi.org/10.1039/c8ra06417b |
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