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The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD

Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofur...

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Detalles Bibliográficos
Autores principales: Potter, Dominic B., Parkin, Ivan P., Carmalt, Claire J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086484/
https://www.ncbi.nlm.nih.gov/pubmed/35548105
http://dx.doi.org/10.1039/c8ra06417b
_version_ 1784704011833704448
author Potter, Dominic B.
Parkin, Ivan P.
Carmalt, Claire J.
author_facet Potter, Dominic B.
Parkin, Ivan P.
Carmalt, Claire J.
author_sort Potter, Dominic B.
collection PubMed
description Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofuran, n-hexane, cyclohexane, and ethyl acetate. The crystal structures, elemental compositions and surface morphologies of the resulting AZO films were determined, as well as the optoelectronic properties. It was found that the more polar solvents enhanced growth in the (002) plane of the wurtzite crystal structure, and that solutions with low viscosities resulted in superior grain growth. The film deposited from a solution consisting of methanol and ethyl acetate displayed the lowest visible transmittance, due to carbon contamination. However, it also exhibited 60% lower resistivity, in comparison to the film deposited using methanol only. This suggests that optoelectronic properties can be tuned for specific photovoltaic devices.
format Online
Article
Text
id pubmed-9086484
institution National Center for Biotechnology Information
language English
publishDate 2018
publisher The Royal Society of Chemistry
record_format MEDLINE/PubMed
spelling pubmed-90864842022-05-10 The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD Potter, Dominic B. Parkin, Ivan P. Carmalt, Claire J. RSC Adv Chemistry Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofuran, n-hexane, cyclohexane, and ethyl acetate. The crystal structures, elemental compositions and surface morphologies of the resulting AZO films were determined, as well as the optoelectronic properties. It was found that the more polar solvents enhanced growth in the (002) plane of the wurtzite crystal structure, and that solutions with low viscosities resulted in superior grain growth. The film deposited from a solution consisting of methanol and ethyl acetate displayed the lowest visible transmittance, due to carbon contamination. However, it also exhibited 60% lower resistivity, in comparison to the film deposited using methanol only. This suggests that optoelectronic properties can be tuned for specific photovoltaic devices. The Royal Society of Chemistry 2018-09-25 /pmc/articles/PMC9086484/ /pubmed/35548105 http://dx.doi.org/10.1039/c8ra06417b Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by/3.0/
spellingShingle Chemistry
Potter, Dominic B.
Parkin, Ivan P.
Carmalt, Claire J.
The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title_full The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title_fullStr The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title_full_unstemmed The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title_short The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD
title_sort effect of solvent on al-doped zno thin films deposited via aerosol assisted cvd
topic Chemistry
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086484/
https://www.ncbi.nlm.nih.gov/pubmed/35548105
http://dx.doi.org/10.1039/c8ra06417b
work_keys_str_mv AT potterdominicb theeffectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd
AT parkinivanp theeffectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd
AT carmaltclairej theeffectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd
AT potterdominicb effectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd
AT parkinivanp effectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd
AT carmaltclairej effectofsolventonaldopedznothinfilmsdepositedviaaerosolassistedcvd