Evaluation of Three Sample Introduction Systems for Impurity Analysis of an Ultrapure Reagent Using a Scanning Mobility Particle Sizer

[Image: see text] The semiconductor industry continues to shrink the device sizes while applying more complex shapes and using diverse materials, which requires parallel improvements in the quality of ultrapure reagents. The need for ultrapure reagents has led to ever-higher demands for the performa...

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Detalles Bibliográficos
Autores principales: Chang, Alice Chinghsuan, Hung, Shu-Han, Pan, Yi-Hsuan, Liu, Yi-Hung, Fu, Wei-En, Lin, Yu-Ju, Lin, Fang-hsin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9088961/
https://www.ncbi.nlm.nih.gov/pubmed/35559149
http://dx.doi.org/10.1021/acsomega.1c07168

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9088961/
https://www.ncbi.nlm.nih.gov/pubmed/35559149
http://dx.doi.org/10.1021/acsomega.1c07168

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