High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

Based on Mindlin’s first-order plate theory, the high-frequency vibrations of piezoelectric bulk acoustic wave array sensors under lateral-field-excitation based on crystals with 3 m point group are analyzed, and the spectral-frequency relationships are solved, based on which, the optimal length–thi...

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Detalles Bibliográficos
Autores principales: Xu, Jiachao, Shi, Hao, Sun, Fei, Tang, Zehuan, Li, Shuanghuizhi, Chen, Dudu, Ma, Tingfeng, Kuznetsova, Iren, Nedospasov, Ilya, Zhang, Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9099703/
https://www.ncbi.nlm.nih.gov/pubmed/35591285
http://dx.doi.org/10.3390/s22093596

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