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Sensitive Transfer-Free Wafer-Scale Graphene Microphones

[Image: see text] During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of micropho...

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Autores principales: Pezone, Roberto, Baglioni, Gabriele, Sarro, Pasqualina M., Steeneken, Peter G., Vollebregt, Sten
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9100512/
https://www.ncbi.nlm.nih.gov/pubmed/35475352
http://dx.doi.org/10.1021/acsami.2c03305
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author Pezone, Roberto
Baglioni, Gabriele
Sarro, Pasqualina M.
Steeneken, Peter G.
Vollebregt, Sten
author_facet Pezone, Roberto
Baglioni, Gabriele
Sarro, Pasqualina M.
Steeneken, Peter G.
Vollebregt, Sten
author_sort Pezone, Roberto
collection PubMed
description [Image: see text] During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85–155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa(–1), thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa(–1). The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20–20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.
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spelling pubmed-91005122022-05-14 Sensitive Transfer-Free Wafer-Scale Graphene Microphones Pezone, Roberto Baglioni, Gabriele Sarro, Pasqualina M. Steeneken, Peter G. Vollebregt, Sten ACS Appl Mater Interfaces [Image: see text] During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85–155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa(–1), thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa(–1). The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20–20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones. American Chemical Society 2022-04-27 2022-05-11 /pmc/articles/PMC9100512/ /pubmed/35475352 http://dx.doi.org/10.1021/acsami.2c03305 Text en © 2022 The Authors. Published by American Chemical Society https://creativecommons.org/licenses/by/4.0/Permits the broadest form of re-use including for commercial purposes, provided that author attribution and integrity are maintained (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Pezone, Roberto
Baglioni, Gabriele
Sarro, Pasqualina M.
Steeneken, Peter G.
Vollebregt, Sten
Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title_full Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title_fullStr Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title_full_unstemmed Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title_short Sensitive Transfer-Free Wafer-Scale Graphene Microphones
title_sort sensitive transfer-free wafer-scale graphene microphones
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9100512/
https://www.ncbi.nlm.nih.gov/pubmed/35475352
http://dx.doi.org/10.1021/acsami.2c03305
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