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Sensitive Transfer-Free Wafer-Scale Graphene Microphones
[Image: see text] During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of micropho...
Autores principales: | Pezone, Roberto, Baglioni, Gabriele, Sarro, Pasqualina M., Steeneken, Peter G., Vollebregt, Sten |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9100512/ https://www.ncbi.nlm.nih.gov/pubmed/35475352 http://dx.doi.org/10.1021/acsami.2c03305 |
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