Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering

In this article, the depositions and functional characterizations of Ta-N and Ta-Al-N coatings for protection purposes, grown by reactive high-power impulse magnetron sputtering onto silicon substrates, are described. Nitride films were grown while changing the substrate polarization voltage (i.e.,...

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Detalles Bibliográficos
Autores principales: Zin, Valentina, Montagner, Francesco, Deambrosis, Silvia Maria, Mortalò, Cecilia, Litti, Lucio, Meneghetti, Moreno, Miorin, Enrico
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9105625/
https://www.ncbi.nlm.nih.gov/pubmed/35591688
http://dx.doi.org/10.3390/ma15093354

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