In-Situ Imaging of a Light-Induced Modification Process in Organo-Silica Films via Time-Domain Brillouin Scattering

We applied time-domain Brillouin scattering (TDBS) for the characterization of porogen-based organosilicate glass (OGS) films deposited by spin-on-glass technology and cured under different conditions. Although the chemical composition and porosity measured by Fourier-transform infrared (FTIR) spect...

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Detalles Bibliográficos
Autores principales: Sandeep, Sathyan, Vishnevskiy, Alexey S., Raetz, Samuel, Naumov, Sergej, Seregin, Dmitry S., Husiev, Artem, Vorotilov, Konstantin A., Gusev, Vitalyi E., Baklanov, Mikhail R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9106017/
https://www.ncbi.nlm.nih.gov/pubmed/35564309
http://dx.doi.org/10.3390/nano12091600

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