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Integrated CuO/Pd Nanospike Hydrogen Sensor on Silicon Substrate

A large area of randomly distributed nanospike as nanostructured template was induced by femtosecond (fs) laser on a silicon substrate in water. Copper oxide (CuO) and palladium (Pd) heterostructured nanofilm were coated on the nanospikes by magnetron sputtering technology and vacuum thermal evapora...

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Detalles Bibliográficos
Autores principales:	Lin, Ru, Hu, Qi, Liu, Zuolian, Pan, Shusheng, Chen, Zhifeng, Zhang, Wei, Liu, Zhiyu, Zhang, Shaolin, Zhang, Chengyun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9106042/ https://www.ncbi.nlm.nih.gov/pubmed/35564243 http://dx.doi.org/10.3390/nano12091533

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