Multimode Fano Resonances Sensing Based on a Non-Through MIM Waveguide with a Square Split-Ring Resonance Cavity

In this article, a non-through metal–insulator–metal (MIM) waveguide that can excite fivefold Fano resonances is reported. The Fano resonances are obtained by the interaction between the modes excited by the square split-ring resonator (SSRC) and the bus waveguide. After a detailed analysis of the transmission characteristics and magnetic field strength of the structure using the finite element method (FEM), it was found that the independent tuning of Fano resonance wavelength and transmittance can be achieved by adjusting the geometric parameters of SSRC. In addition, after optimizing the geometric parameters, the refractive index sensing sensitivity (S) and figure of merit (FOM) of the structure can be optimal, which are 1290.2 nm/RIU and 3.6 × 10(4), respectively. Additionally, the annular cavity of the MIM waveguide structure can also be filled with biomass solution to act as a biosensor. On this basis, the structure can be produced for optical refractive index sensing in the biological, micro and nano fields.