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Optofluidic Particle Manipulation Platform with Nanomembrane
We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9142978/ https://www.ncbi.nlm.nih.gov/pubmed/35630187 http://dx.doi.org/10.3390/mi13050721 |
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author | Walker, Zachary J. Wells, Tanner Belliston, Ethan Romney, Sage Walker, Seth B. Sampad, Mohammad Julker Neyen Saiduzzaman, S M Losakul, Ravipa Schmidt, Holger Hawkins, Aaron R. |
author_facet | Walker, Zachary J. Wells, Tanner Belliston, Ethan Romney, Sage Walker, Seth B. Sampad, Mohammad Julker Neyen Saiduzzaman, S M Losakul, Ravipa Schmidt, Holger Hawkins, Aaron R. |
author_sort | Walker, Zachary J. |
collection | PubMed |
description | We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide through thermal oxidation. Channels are encapsulated by a sacrificial polymer which fills the length of the fluid channel by way of spontaneous capillary action. The sacrificial material is then used as a mold for the formation of a nanoscale, solid-state, silicon dioxide membrane. The hollow channel is primarily used for fluid and particle transport but is capable of transmitting light over short distances and utilizes radiation pressure for particle trapping applications. The optofluidic platform features solid-core ridge waveguides which can direct light on and off of the silicon chip and intersect liquid channels. Optical loss values are characterized for liquid and solid-core structures and at interfaces. Estimates are provided for the optical power needed to trap particles of various sizes. |
format | Online Article Text |
id | pubmed-9142978 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-91429782022-05-29 Optofluidic Particle Manipulation Platform with Nanomembrane Walker, Zachary J. Wells, Tanner Belliston, Ethan Romney, Sage Walker, Seth B. Sampad, Mohammad Julker Neyen Saiduzzaman, S M Losakul, Ravipa Schmidt, Holger Hawkins, Aaron R. Micromachines (Basel) Article We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide through thermal oxidation. Channels are encapsulated by a sacrificial polymer which fills the length of the fluid channel by way of spontaneous capillary action. The sacrificial material is then used as a mold for the formation of a nanoscale, solid-state, silicon dioxide membrane. The hollow channel is primarily used for fluid and particle transport but is capable of transmitting light over short distances and utilizes radiation pressure for particle trapping applications. The optofluidic platform features solid-core ridge waveguides which can direct light on and off of the silicon chip and intersect liquid channels. Optical loss values are characterized for liquid and solid-core structures and at interfaces. Estimates are provided for the optical power needed to trap particles of various sizes. MDPI 2022-04-30 /pmc/articles/PMC9142978/ /pubmed/35630187 http://dx.doi.org/10.3390/mi13050721 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Walker, Zachary J. Wells, Tanner Belliston, Ethan Romney, Sage Walker, Seth B. Sampad, Mohammad Julker Neyen Saiduzzaman, S M Losakul, Ravipa Schmidt, Holger Hawkins, Aaron R. Optofluidic Particle Manipulation Platform with Nanomembrane |
title | Optofluidic Particle Manipulation Platform with Nanomembrane |
title_full | Optofluidic Particle Manipulation Platform with Nanomembrane |
title_fullStr | Optofluidic Particle Manipulation Platform with Nanomembrane |
title_full_unstemmed | Optofluidic Particle Manipulation Platform with Nanomembrane |
title_short | Optofluidic Particle Manipulation Platform with Nanomembrane |
title_sort | optofluidic particle manipulation platform with nanomembrane |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9142978/ https://www.ncbi.nlm.nih.gov/pubmed/35630187 http://dx.doi.org/10.3390/mi13050721 |
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