Optofluidic Particle Manipulation Platform with Nanomembrane

We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide...

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Detalles Bibliográficos
Autores principales: Walker, Zachary J., Wells, Tanner, Belliston, Ethan, Romney, Sage, Walker, Seth B., Sampad, Mohammad Julker Neyen, Saiduzzaman, S M, Losakul, Ravipa, Schmidt, Holger, Hawkins, Aaron R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9142978/
https://www.ncbi.nlm.nih.gov/pubmed/35630187
http://dx.doi.org/10.3390/mi13050721

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