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Fabrication of Ultrafine, Highly Ordered Nanostructures Using Carbohydrate-Inorganic Hybrid Block Copolymers

Block copolymers (BCPs) have garnered considerable interest due to their ability to form microphase-separated structures suitable for nanofabrication. For these applications, it is critical to achieve both sufficient etch selectivity and a small domain size. To meet both requirements concurrently, w...

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Detalles Bibliográficos
Autores principales:	Nishimura, Taiki, Katsuhara, Satoshi, Lee, Chaehun, Ree, Brian J., Borsali, Redouane, Yamamoto, Takuya, Tajima, Kenji, Satoh, Toshifumi, Isono, Takuya
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144075/ https://www.ncbi.nlm.nih.gov/pubmed/35630875 http://dx.doi.org/10.3390/nano12101653

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