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High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design

This paper presents a high quality-factor (Q) and spectrum-clean AlN Lamb-wave resonator (LWR). The width of its lateral reflection boundary was optimized to weaken the transverse modes’ coupling and wave guiding, and then to improve the LWR’s Q value and spectral purity, which was verified by finit...

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Detalles Bibliográficos
Autores principales:	Sun, Haiyan, Lv, Shitao, Zhang, Aoyu, Song, Chenguang, Sun, Xinyi, Tan, Fazeng, Liang, Liuhong, Zhu, Yinfang, Zhao, Jicong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144301/ https://www.ncbi.nlm.nih.gov/pubmed/35630246 http://dx.doi.org/10.3390/mi13050779

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