MIS-Like Structures with Silicon-Rich Oxide Films Obtained by HFCVD: Their Response as Photodetectors

MIS-type structures composed of silicon-rich oxide (SRO), thin films deposited by hot filament chemical vapor deposition (HFCVD), show interesting I-V and I-t properties under white light illumination and a response as photodetectors. From electrical measurements, it was found that at a reverse bias...

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Detalles Bibliográficos
Autores principales: Mendoza Conde, Gabriel Omar, Luna López, José Alberto, Hernández Simón, Zaira Jocelyn, Hernández de la Luz, José Álvaro David, García Salgado, Godofredo, Gastellou Hernández, Erick, Martínez Hernández, Haydee Patricia, Flores Méndez, Javier
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144505/
https://www.ncbi.nlm.nih.gov/pubmed/35632313
http://dx.doi.org/10.3390/s22103904

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