Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements

Grating interferometers that use large two-dimensional grating splice modules for performing wide-range measurements have significant advantages for identifying the position of the wafer stage. However, the manufacturing process of large two-dimensional grating splice modules is very difficult. In c...

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Detalles Bibliográficos
Autores principales: Ye, Weinan, Cheng, Rong, Zhang, Ming, Zhu, Yu, Wang, Leijie, Hu, Jinchun, Li, Xin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144901/
https://www.ncbi.nlm.nih.gov/pubmed/35632147
http://dx.doi.org/10.3390/s22103738

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144901/
https://www.ncbi.nlm.nih.gov/pubmed/35632147
http://dx.doi.org/10.3390/s22103738

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