Cargando…
Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements
Grating interferometers that use large two-dimensional grating splice modules for performing wide-range measurements have significant advantages for identifying the position of the wafer stage. However, the manufacturing process of large two-dimensional grating splice modules is very difficult. In c...
Autores principales: | Ye, Weinan, Cheng, Rong, Zhang, Ming, Zhu, Yu, Wang, Leijie, Hu, Jinchun, Li, Xin |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144901/ https://www.ncbi.nlm.nih.gov/pubmed/35632147 http://dx.doi.org/10.3390/s22103738 |
Ejemplares similares
-
Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
por: Ye, Weinan, et al.
Publicado: (2019) -
Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation
por: Yang, Fuzhong, et al.
Publicado: (2019) -
Analysis of the Errors Caused by Disturbed Multimode Fibers in the Interferometer with Fiber-Coupled Delivery
por: Xia, Yizhou, et al.
Publicado: (2020) -
Three Phase-Grating Moiré Neutron Interferometer for Large Interferometer Area Applications
por: Sarenac, D., et al.
Publicado: (2018) -
An Optical MEMS Acoustic Sensor Based on Grating Interferometer
por: Zhang, Mengying, et al.
Publicado: (2019)