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A Review on Coupled Bulk Acoustic Wave MEMS Resonators

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and...

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Detalles Bibliográficos
Autores principales:	Wang, Linlin, Wang, Chen, Wang, Yuan, Quan, Aojie, Keshavarz, Masoumeh, Madeira, Bernardo Pereira, Zhang, Hemin, Wang, Chenxi, Kraft, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144905/ https://www.ncbi.nlm.nih.gov/pubmed/35632263 http://dx.doi.org/10.3390/s22103857

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