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Toward an Accurate IR Remote Sensing of Body Temperature Radiometer Based on a Novel IR Sensing System Dubbed Digital TMOS
A novel uncooled thermal sensor based on a suspended transistor, fabricated in standard CMOS-SOI process, and released by dry etching, dubbed Digital TMOS, has been developed. Using the transistor as the sensing element has advantages in terms of internal gain, low power, low-cost technology, and hi...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145132/ https://www.ncbi.nlm.nih.gov/pubmed/35630174 http://dx.doi.org/10.3390/mi13050703 |