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THz MEMS Switch Design

In this work, an mm-wave/THz MEMS switch design process is presented. The challenges and solutions associated with the switch electrical design, modeling, fabrication, and test are explored and discussed. To investigate the feasibility of this design process, the switches are designed on both silico...

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Detalles Bibliográficos
Autores principales: Feng, Yukang, Tsao, Han-yu, Barker, N. Scott
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145249/
https://www.ncbi.nlm.nih.gov/pubmed/35630211
http://dx.doi.org/10.3390/mi13050745

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