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Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films

Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graph...

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Autores principales: Hagendoorn, Yelena, Pandraud, Gregory, Vollebregt, Sten, Morana, Bruno, Sarro, Pasqualina M., Steeneken, Peter G.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9146350/
https://www.ncbi.nlm.nih.gov/pubmed/35629749
http://dx.doi.org/10.3390/ma15103723
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author Hagendoorn, Yelena
Pandraud, Gregory
Vollebregt, Sten
Morana, Bruno
Sarro, Pasqualina M.
Steeneken, Peter G.
author_facet Hagendoorn, Yelena
Pandraud, Gregory
Vollebregt, Sten
Morana, Bruno
Sarro, Pasqualina M.
Steeneken, Peter G.
author_sort Hagendoorn, Yelena
collection PubMed
description Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO(2) layer on a silicon wafer by employing a Pt thin film as catalyst. We pattern the platinum film, after which a CVD graphene layer is grown at the interface between the SiO(2) and the Pt. After removing the Pt, Raman spectroscopy demonstrates the local growth of monolayer graphene on SiO(2). By tuning the CVD process, we were able to fully cover 4-inch oxidized silicon wafers with transfer-free monolayer graphene, a result that is not easily obtained using other methods. By adding Ta structures, local graphene growth on SiO(2) is selectively blocked, allowing the controlled graphene growth on areas selected by mask design.
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spelling pubmed-91463502022-05-29 Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films Hagendoorn, Yelena Pandraud, Gregory Vollebregt, Sten Morana, Bruno Sarro, Pasqualina M. Steeneken, Peter G. Materials (Basel) Article Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO(2) layer on a silicon wafer by employing a Pt thin film as catalyst. We pattern the platinum film, after which a CVD graphene layer is grown at the interface between the SiO(2) and the Pt. After removing the Pt, Raman spectroscopy demonstrates the local growth of monolayer graphene on SiO(2). By tuning the CVD process, we were able to fully cover 4-inch oxidized silicon wafers with transfer-free monolayer graphene, a result that is not easily obtained using other methods. By adding Ta structures, local graphene growth on SiO(2) is selectively blocked, allowing the controlled graphene growth on areas selected by mask design. MDPI 2022-05-23 /pmc/articles/PMC9146350/ /pubmed/35629749 http://dx.doi.org/10.3390/ma15103723 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Hagendoorn, Yelena
Pandraud, Gregory
Vollebregt, Sten
Morana, Bruno
Sarro, Pasqualina M.
Steeneken, Peter G.
Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title_full Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title_fullStr Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title_full_unstemmed Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title_short Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
title_sort direct wafer-scale cvd graphene growth under platinum thin-films
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9146350/
https://www.ncbi.nlm.nih.gov/pubmed/35629749
http://dx.doi.org/10.3390/ma15103723
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