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Integrated Piezoresistive Normal Force Sensors Fabricated Using Transfer Processes with Stiction Effect Temporary Handling

Tactile sensation is a highly desired function in robotics. Furthermore, tactile sensor arrays are crucial sensing elements in pulse diagnosis instruments. This paper presents the fabrication of an integrated piezoresistive normal force sensor through surface micromachining. The force sensor is tran...

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Detalles Bibliográficos
Autores principales:	Liu, Ni, Zhong, Peng, Zheng, Chaoyue, Sun, Ke, Zhong, Yifei, Yang, Heng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9148121/ https://www.ncbi.nlm.nih.gov/pubmed/35630226 http://dx.doi.org/10.3390/mi13050759

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