Optimal Energetic-Trap Distribution of Nano-Scaled Charge Trap Nitride for Wider V(th) Window in 3D NAND Flash Using a Machine-Learning Method

A machine-learning (ML) technique was used to optimize the energetic-trap distributions of nano-scaled charge trap nitride (CTN) in 3D NAND Flash to widen the threshold voltage (V(th)) window, which is crucial for NAND operation. The energetic-trap distribution is a critical material property of the...

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Detalles Bibliográficos
Autores principales: Nam, Kihoon, Park, Chanyang, Yoon, Jun-Sik, Yun, Hyeok, Jang, Hyundong, Cho, Kyeongrae, Kang, Ho-Jung, Park, Min-Sang, Sim, Jaesung, Choi, Hyun-Chul, Baek, Rock-Hyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182095/
https://www.ncbi.nlm.nih.gov/pubmed/35683664
http://dx.doi.org/10.3390/nano12111808

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