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Tailoring of Multisource Deposition Conditions towards Required Chemical Composition of Thin Films

The model to tailor the required chemical composition of thin films fabricated via multisource deposition, exploiting basic physicochemical constants of source materials, is developed. The model is experimentally verified for the two-source depositions of chalcogenide thin films from Ga–Sb–Te system...

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Detalles Bibliográficos
Autores principales:	Gutwirth, Jan, Kotrla, Magdaléna, Halenkovič, Tomáš, Nazabal, Virginie, Němec, Petr
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182166/ https://www.ncbi.nlm.nih.gov/pubmed/35683686 http://dx.doi.org/10.3390/nano12111830

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