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Influence of Temperature Parameters on Morphological Characteristics of Plasma Deposited Zinc Oxide Nanoparticles

Zinc oxide nanoparticles were obtained by plasma-enhanced chemical vapor deposition (PECVD) under optical emission spectrometry control from elemental high-purity zinc in a zinc–oxygen–hydrogen plasma-forming gas mixture with varying deposition parameters: a zinc source temperature, and a reactor te...

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Detalles Bibliográficos
Autores principales:	Sazanova, Tatyana Sergeevna, Mochalov, Leonid Alexandrovich, Logunov, Alexander Alexandrovich, Kudryashov, Mikhail Alexandrovich, Fukina, Diana Georgievna, Vshivtsev, Maksim Anatolevich, Prokhorov, Igor Olegovich, Yunin, Pavel Andreevich, Smorodin, Kirill Alexandrovich, Atlaskin, Artem Anatolevich, Vorotyntsev, Andrey Vladimirovich
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182487/ https://www.ncbi.nlm.nih.gov/pubmed/35683699 http://dx.doi.org/10.3390/nano12111838

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