Cargando…
Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning
We propose two novel methods to effectively utilize parylene C films. First, we demonstrate a vertical deposition method capable of depositing a parylene C film of the same thickness on both sides of a sample. Through this method, we have formed parylene C films with a thickness of 4 μm on both side...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9184507/ https://www.ncbi.nlm.nih.gov/pubmed/35681067 http://dx.doi.org/10.1038/s41598-022-13080-w |