Optical data of graphene grown by chemical vapor deposition on copper foil using spectroscopic ellipsometry

Hexagonal, carbon-based structures were prepared on bare and treated copper foil substrates by Chemical Vapor Deposition at 1075 (ᵒ)C using a graphite box for limiting copper reactivity with hydrocarbon gases during growth reactions. Spectroscopic ellipsometry with a digital camera was used to collect the amplitude ratio and the phase of structures various spots. The amplitude ratio of hexagonal structures on copper substrates was collected based on substrate treatment type and thickness as well as reaction zone conditions and methane flow rates. Matched amplitude ratio was obtained only for 75 µm thick acetic acid copper foil substrates inside and outside the graphite box at a low methane flow rate of 0.2 sccm. Moreover, the amplitude ratio of 75 µm bare copper foil and 75 µm electro-polished copper foil substrates at methane flow rates of 0.2 - 0.3 sccm were unmatched. Ellipsometric parameters data use potential is assessment of graphene layer thickness on different surfaces. Data shows dependence of the amplitude ratio on the surface roughness of copper foil, gas concentrations and reaction zone conditions.