Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources

The demand for synthetic diamonds and research on their use in next-generation semiconductor devices have recently increased. Microwave plasma chemical vapor deposition (MPCVD) is considered one of the most promising techniques for the mass production of large-sized and high-quality single-, micro-...

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Detalles Bibliográficos
Autores principales: Hong, Seung Pyo, Lee, Kang-il, You, Hyun Jong, Jang, Soo Ouk, Choi, Young Sup
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227223/
https://www.ncbi.nlm.nih.gov/pubmed/35745298
http://dx.doi.org/10.3390/nano12121959

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227223/
https://www.ncbi.nlm.nih.gov/pubmed/35745298
http://dx.doi.org/10.3390/nano12121959

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