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Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources

The demand for synthetic diamonds and research on their use in next-generation semiconductor devices have recently increased. Microwave plasma chemical vapor deposition (MPCVD) is considered one of the most promising techniques for the mass production of large-sized and high-quality single-, micro-...

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Detalles Bibliográficos
Autores principales:	Hong, Seung Pyo, Lee, Kang-il, You, Hyun Jong, Jang, Soo Ouk, Choi, Young Sup
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227223/ https://www.ncbi.nlm.nih.gov/pubmed/35745298 http://dx.doi.org/10.3390/nano12121959

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