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Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement
A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227544/ https://www.ncbi.nlm.nih.gov/pubmed/35744567 http://dx.doi.org/10.3390/mi13060951 |
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author | Liu, Yonggang Zhang, Shuliang Yan, Pengfei Li, Hiji |
author_facet | Liu, Yonggang Zhang, Shuliang Yan, Pengfei Li, Hiji |
author_sort | Liu, Yonggang |
collection | PubMed |
description | A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices. |
format | Online Article Text |
id | pubmed-9227544 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-92275442022-06-25 Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement Liu, Yonggang Zhang, Shuliang Yan, Pengfei Li, Hiji Micromachines (Basel) Article A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices. MDPI 2022-06-16 /pmc/articles/PMC9227544/ /pubmed/35744567 http://dx.doi.org/10.3390/mi13060951 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Liu, Yonggang Zhang, Shuliang Yan, Pengfei Li, Hiji Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title | Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title_full | Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title_fullStr | Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title_full_unstemmed | Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title_short | Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement |
title_sort | finite element modeling and test of piezo disk with local ring electrodes for micro displacement |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227544/ https://www.ncbi.nlm.nih.gov/pubmed/35744567 http://dx.doi.org/10.3390/mi13060951 |
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