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High-Throughput Direct Writing of Metallic Micro- and Nano-Structures by Focused Ga(+) Beam Irradiation of Palladium Acetate Films
[Image: see text] Metallic nanopatterns are ubiquitous in applications that exploit the electrical conduction at the nanoscale, including interconnects, electrical nanocontacts, and small gaps between metallic pads. These metallic nanopatterns can be designed to show additional physical properties (...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227716/ https://www.ncbi.nlm.nih.gov/pubmed/35671475 http://dx.doi.org/10.1021/acsami.2c05218 |