Cargando…

Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies

Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of curre...

Descripción completa

Detalles Bibliográficos
Autores principales: Bodduluri, Mani Teja, Dankwort, Torben, Lisec, Thomas, Grünzig, Sven, Khare, Anmol, Ahmed, Minhaz, Gojdka, Björn
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227932/
https://www.ncbi.nlm.nih.gov/pubmed/35744476
http://dx.doi.org/10.3390/mi13060863
_version_ 1784734309947539456
author Bodduluri, Mani Teja
Dankwort, Torben
Lisec, Thomas
Grünzig, Sven
Khare, Anmol
Ahmed, Minhaz
Gojdka, Björn
author_facet Bodduluri, Mani Teja
Dankwort, Torben
Lisec, Thomas
Grünzig, Sven
Khare, Anmol
Ahmed, Minhaz
Gojdka, Björn
author_sort Bodduluri, Mani Teja
collection PubMed
description Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of current development. In this work, we present a mechanically and magnetically excitable MEMS vibrational piezoelectric energy harvester featuring wafer-level integrated rare-earth micromagnets. The latter enable harvesting of energy efficiently both in resonance and from low-g, low-frequency mechanical energy sources. Under rotational magnetic excitation at frequencies below 50 Hz, RMS power output up to 74.11 µW is demonstrated in frequency up-conversion. Magnetic excitation in resonance results in open-circuit voltages > 9 V and RMS power output up to 139.39 µW. For purely mechanical excitation, the powder-based integration process allows the realization of high-density and thus compact proof masses in the cantilever design. Accordingly, the device achieves 24.75 µW power output under mechanical excitation of 0.75 g at resonance. The ability to load a capacitance of 2.8 µF at 2.5 V within 30 s is demonstrated, facilitating a custom design low-power ASIC.
format Online
Article
Text
id pubmed-9227932
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-92279322022-06-25 Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies Bodduluri, Mani Teja Dankwort, Torben Lisec, Thomas Grünzig, Sven Khare, Anmol Ahmed, Minhaz Gojdka, Björn Micromachines (Basel) Article Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of current development. In this work, we present a mechanically and magnetically excitable MEMS vibrational piezoelectric energy harvester featuring wafer-level integrated rare-earth micromagnets. The latter enable harvesting of energy efficiently both in resonance and from low-g, low-frequency mechanical energy sources. Under rotational magnetic excitation at frequencies below 50 Hz, RMS power output up to 74.11 µW is demonstrated in frequency up-conversion. Magnetic excitation in resonance results in open-circuit voltages > 9 V and RMS power output up to 139.39 µW. For purely mechanical excitation, the powder-based integration process allows the realization of high-density and thus compact proof masses in the cantilever design. Accordingly, the device achieves 24.75 µW power output under mechanical excitation of 0.75 g at resonance. The ability to load a capacitance of 2.8 µF at 2.5 V within 30 s is demonstrated, facilitating a custom design low-power ASIC. MDPI 2022-05-30 /pmc/articles/PMC9227932/ /pubmed/35744476 http://dx.doi.org/10.3390/mi13060863 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bodduluri, Mani Teja
Dankwort, Torben
Lisec, Thomas
Grünzig, Sven
Khare, Anmol
Ahmed, Minhaz
Gojdka, Björn
Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title_full Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title_fullStr Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title_full_unstemmed Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title_short Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
title_sort fully integrated high-performance mems energy harvester for mechanical and contactless magnetic excitation in resonance and at low frequencies
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227932/
https://www.ncbi.nlm.nih.gov/pubmed/35744476
http://dx.doi.org/10.3390/mi13060863
work_keys_str_mv AT boddulurimaniteja fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT dankworttorben fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT lisecthomas fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT grunzigsven fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT khareanmol fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT ahmedminhaz fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies
AT gojdkabjorn fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies