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Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies
Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of curre...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227932/ https://www.ncbi.nlm.nih.gov/pubmed/35744476 http://dx.doi.org/10.3390/mi13060863 |
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author | Bodduluri, Mani Teja Dankwort, Torben Lisec, Thomas Grünzig, Sven Khare, Anmol Ahmed, Minhaz Gojdka, Björn |
author_facet | Bodduluri, Mani Teja Dankwort, Torben Lisec, Thomas Grünzig, Sven Khare, Anmol Ahmed, Minhaz Gojdka, Björn |
author_sort | Bodduluri, Mani Teja |
collection | PubMed |
description | Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of current development. In this work, we present a mechanically and magnetically excitable MEMS vibrational piezoelectric energy harvester featuring wafer-level integrated rare-earth micromagnets. The latter enable harvesting of energy efficiently both in resonance and from low-g, low-frequency mechanical energy sources. Under rotational magnetic excitation at frequencies below 50 Hz, RMS power output up to 74.11 µW is demonstrated in frequency up-conversion. Magnetic excitation in resonance results in open-circuit voltages > 9 V and RMS power output up to 139.39 µW. For purely mechanical excitation, the powder-based integration process allows the realization of high-density and thus compact proof masses in the cantilever design. Accordingly, the device achieves 24.75 µW power output under mechanical excitation of 0.75 g at resonance. The ability to load a capacitance of 2.8 µF at 2.5 V within 30 s is demonstrated, facilitating a custom design low-power ASIC. |
format | Online Article Text |
id | pubmed-9227932 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-92279322022-06-25 Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies Bodduluri, Mani Teja Dankwort, Torben Lisec, Thomas Grünzig, Sven Khare, Anmol Ahmed, Minhaz Gojdka, Björn Micromachines (Basel) Article Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of current development. In this work, we present a mechanically and magnetically excitable MEMS vibrational piezoelectric energy harvester featuring wafer-level integrated rare-earth micromagnets. The latter enable harvesting of energy efficiently both in resonance and from low-g, low-frequency mechanical energy sources. Under rotational magnetic excitation at frequencies below 50 Hz, RMS power output up to 74.11 µW is demonstrated in frequency up-conversion. Magnetic excitation in resonance results in open-circuit voltages > 9 V and RMS power output up to 139.39 µW. For purely mechanical excitation, the powder-based integration process allows the realization of high-density and thus compact proof masses in the cantilever design. Accordingly, the device achieves 24.75 µW power output under mechanical excitation of 0.75 g at resonance. The ability to load a capacitance of 2.8 µF at 2.5 V within 30 s is demonstrated, facilitating a custom design low-power ASIC. MDPI 2022-05-30 /pmc/articles/PMC9227932/ /pubmed/35744476 http://dx.doi.org/10.3390/mi13060863 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Bodduluri, Mani Teja Dankwort, Torben Lisec, Thomas Grünzig, Sven Khare, Anmol Ahmed, Minhaz Gojdka, Björn Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title | Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title_full | Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title_fullStr | Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title_full_unstemmed | Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title_short | Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies |
title_sort | fully integrated high-performance mems energy harvester for mechanical and contactless magnetic excitation in resonance and at low frequencies |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227932/ https://www.ncbi.nlm.nih.gov/pubmed/35744476 http://dx.doi.org/10.3390/mi13060863 |
work_keys_str_mv | AT boddulurimaniteja fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT dankworttorben fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT lisecthomas fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT grunzigsven fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT khareanmol fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT ahmedminhaz fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies AT gojdkabjorn fullyintegratedhighperformancememsenergyharvesterformechanicalandcontactlessmagneticexcitationinresonanceandatlowfrequencies |