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Overview of the MEMS Pirani Sensors

Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecti...

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Detalles Bibliográficos
Autores principales:	Xu, Shaohang, Zhou, Na, Shi, Meng, Zhang, Chenchen, Chen, Dapeng, Mao, Haiyang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9228132/ https://www.ncbi.nlm.nih.gov/pubmed/35744559 http://dx.doi.org/10.3390/mi13060945

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