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Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a...

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Autores principales: Aleksandrova, Mariya, Kolev, Georgi, Dobrikov, Georgi, Brigadin, Andrey, Lukin, Alexander
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229548/
https://www.ncbi.nlm.nih.gov/pubmed/35745404
http://dx.doi.org/10.3390/nano12122066
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author Aleksandrova, Mariya
Kolev, Georgi
Dobrikov, Georgi
Brigadin, Andrey
Lukin, Alexander
author_facet Aleksandrova, Mariya
Kolev, Georgi
Dobrikov, Georgi
Brigadin, Andrey
Lukin, Alexander
author_sort Aleksandrova, Mariya
collection PubMed
description Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a part of microcapacitors with flexible electrodes, with various sizes and topologies. The carbyne-enriched nanocoating was grown using the ion-assisted pulse-plasma deposition method in the form of 2D-ordered linear-chain carbon with interchain spacing in the range of approximately 4.8–5.03 Å. The main characteristics of the fabricated sensors, such as dynamic range, sensitivity, linearity, response, and recovery times, were measured as a function of the ethanol concentration and compared for the different sizes of the micromembranes and for the different surface states, such as patterned and non-patterned. The obtained results are the first step in the further optimization of these sensor platforms to reach more precise detection of volatile organic compounds for the needs of the healthcare, air monitoring, and other relevant fields of human health.
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spelling pubmed-92295482022-06-25 Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes Aleksandrova, Mariya Kolev, Georgi Dobrikov, Georgi Brigadin, Andrey Lukin, Alexander Nanomaterials (Basel) Article Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a part of microcapacitors with flexible electrodes, with various sizes and topologies. The carbyne-enriched nanocoating was grown using the ion-assisted pulse-plasma deposition method in the form of 2D-ordered linear-chain carbon with interchain spacing in the range of approximately 4.8–5.03 Å. The main characteristics of the fabricated sensors, such as dynamic range, sensitivity, linearity, response, and recovery times, were measured as a function of the ethanol concentration and compared for the different sizes of the micromembranes and for the different surface states, such as patterned and non-patterned. The obtained results are the first step in the further optimization of these sensor platforms to reach more precise detection of volatile organic compounds for the needs of the healthcare, air monitoring, and other relevant fields of human health. MDPI 2022-06-15 /pmc/articles/PMC9229548/ /pubmed/35745404 http://dx.doi.org/10.3390/nano12122066 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Aleksandrova, Mariya
Kolev, Georgi
Dobrikov, Georgi
Brigadin, Andrey
Lukin, Alexander
Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title_full Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title_fullStr Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title_full_unstemmed Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title_short Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
title_sort unlocking the carbyne-enriched nanocoating sensitivity to volatile organic vapors with plasma-driven deposition onto bulk micromachined silicon membranes
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229548/
https://www.ncbi.nlm.nih.gov/pubmed/35745404
http://dx.doi.org/10.3390/nano12122066
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