Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a...

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Detalles Bibliográficos
Autores principales: Aleksandrova, Mariya, Kolev, Georgi, Dobrikov, Georgi, Brigadin, Andrey, Lukin, Alexander
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229548/
https://www.ncbi.nlm.nih.gov/pubmed/35745404
http://dx.doi.org/10.3390/nano12122066

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229548/
https://www.ncbi.nlm.nih.gov/pubmed/35745404
http://dx.doi.org/10.3390/nano12122066

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