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Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229548/ https://www.ncbi.nlm.nih.gov/pubmed/35745404 http://dx.doi.org/10.3390/nano12122066 |