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High Responsivity Thermopile Sensors Featuring a Mosaic Structure

This paper presents a detailed analysis of a micromachined thermopile detector featuring high responsivity and a versatile mosaic structure, based on 128 60 µm × 60 µm pixels connected in series and/or in parallel. The mosaic structure is based on the one employed for the thermal sensor known as TMO...

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Detalles Bibliográficos
Autores principales:	Moisello, Elisabetta, Castagna, Maria Eloisa, La Malfa, Antonella, Bruno, Giuseppe, Malcovati, Piero, Bonizzoni, Edoardo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9230498/ https://www.ncbi.nlm.nih.gov/pubmed/35744547 http://dx.doi.org/10.3390/mi13060934

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