Fabrication of Large-Area Mullite–Cordierite Composite Substrates for Semiconductor Probe Cards and Enhancement of Their Reliability

This work aims to fabricate a large-area ceramic substrate for the application of probe cards. Mullite (M) and cordierite (C), which both have a low thermal expansion coefficient, excellent resistance to thermal shock, and high durability, were selected as starting powders. The mullite–cordierite co...

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Detalles Bibliográficos
Autores principales: Hyun, Da-Eun, Jeon, Jwa-Bin, Lee, Yeon-Sook, Kim, Yong-Nam, Kim, Minkyung, Ko, Seunghoon, Koo, Sang-Mo, Shin, Weon Ho, Park, Chulhwan, Lee, Dong-Won, Oh, Jong-Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9231054/
https://www.ncbi.nlm.nih.gov/pubmed/35744342
http://dx.doi.org/10.3390/ma15124283

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9231054/
https://www.ncbi.nlm.nih.gov/pubmed/35744342
http://dx.doi.org/10.3390/ma15124283

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