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Study of the Pattern Preparation and Performance of the Resistance Grid of Thin-Film Strain Sensors

The thin-film strain sensor is a cutting-force sensor that can be integrated with cutting tools. The quality of the alloy film strain layer resistance grid plays an important role in the performance of the sensor. In this paper, the two film patterning processes of photolithography magnetron sputter...

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Detalles Bibliográficos
Autores principales:	Cheng, Yunping, Wu, Wenge, Zhao, Yongjuan, Han, Yanwen, Song, Ding
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9231059/ https://www.ncbi.nlm.nih.gov/pubmed/35744506 http://dx.doi.org/10.3390/mi13060892

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