Hybrid Lithographic Arbitrary Patterning of TiO(2) Nanorod Arrays

[Image: see text] In this work, we report a hybrid lithographic method that combines the top–down soft lithography and the bottom–up hydrothermal approach for growing single-crystalline TiO(2) nanorod arrays with arbitrary patterns. The arbitrary patterns of TiO(2) seeds were obtained through the microcontact printing of the TiO(2) seed precursor onto Si substrates using prepatterned poly(dimethylsiloxane) (PDMS) as stamps, followed by a baking process. Afterward, TiO(2) nanorod arrays were selectively grown on patterned TiO(2) seeds through conventional hydrothermal methods. By controlling the TiO(2) seed precursor concentration, the hydrothermal reaction time and temperature and the patterns, the morphology and density of the TiO(2) nanorods can be tuned in a controllable manner. Overall, this work provides a new strategy for the low-cost and facile preparation of patterned TiO(2) nanorod arrays that has potential applications in micro–nano-optoelectronic devices and other fields.