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Wafer-Scale Particle Assembly in Connected and Isolated Micromachined Pockets via PDMS Rubbing
[Image: see text] The present contribution reports on a study aiming to find the most suitable rubbing method for filling arrays of separated and interconnected micromachined pockets with individual microspheres on rigid, uncoated silicon substrates without breaking the particles or damaging the sub...
Autores principales: | Verloy, Sandrien, Vankeerberghen, Bert, Jimidar, Ignaas S. M., Gardeniers, Han, Desmet, Gert |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9245185/ https://www.ncbi.nlm.nih.gov/pubmed/35616629 http://dx.doi.org/10.1021/acs.langmuir.2c00593 |
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