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Structure, Mechanical, and Micro-Scratch Behavior of Ta-Hf-C Solid Solution Coating Deposited by Non-Reactive Magnetron Sputtering
The TaC, HfC, and Hf-Ta-C coatings are successfully prepared by non-reactively DC magnetron sputtering. The effects of working pressure and deposition temperature on the structure and mechanical properties of Ta-Hf-C coating are analyzed. The scratch performance of the Ta-Hf-C coating deposited on 3...
Autores principales: | Tan, Zhenyu, Wu, Xiang, Yang, Guo, Guo, Jinwei, Zhu, Wang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9267558/ https://www.ncbi.nlm.nih.gov/pubmed/35806613 http://dx.doi.org/10.3390/ma15134489 |
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